known as self-assembled monolayer (

known as self-assembled monolayer (SAM) coating
that is widely used for the stiction control in microelectrical
mechanical systems (MEMS) [13,14]. The
PFDTS coating is _2 nm thick and is deposited on
magnetic heads by using a vapor deposition process.
The HDI charge measurements before and after fluorinated
carbon coatings on the same magnetic head are
shown in Figure 5. Two obvious changes on HDI
charge curve can be seen with the PFDTS coating.
First, the PW50 curve significantly shifts to the right
or positive voltage direction with the peak of PW50
almost at 0 V. In other words, a more symmetric
PW50 vs. voltage curve or a small contact potential at
HDI is obtained. Second, a significant up-shift of
PW50 curve is observed after PFDTS coating. Spacing
change estimated from the PW50 change was 2–3 nm,
suggesting this up-shift could be mainly due to PFDTS
thickness, which is _2 nm.

Hasil (Bahasa Indonesia) 2:

dikenal sebagai rakitan monolayer (SAM) coating
yang banyak digunakan untuk kontrol stiction di microelectrical
sistem mekanis (MEMS) [13,14]. The
PFDTS pelapisan _2 nm tebal dan diendapkan pada
kepala magnetik dengan menggunakan proses deposisi uap.
Pengukuran biaya HDI sebelum dan sesudah fluorinated
lapisan karbon pada kepala magnetik yang sama
ditunjukkan pada Gambar 5. Dua perubahan jelas pada HDI
kurva biaya dapat terlihat dengan lapisan PFDTS.
Pertama, kurva PW50 signifikan bergeser ke kanan
atau arah tegangan positif dengan puncak PW50
hampir di 0 V. dengan kata lain, lebih simetris
PW50 vs kurva tegangan atau potensial kontak kecil di
HDI adalah diperoleh. Kedua, up-perubahan yang signifikan dari
kurva PW50 diamati setelah PFDTS coating. Spasi
perubahan diperkirakan dari perubahan PW50 adalah 2-3 nm,
menyarankan ini up-pergeseran bisa disebabkan karena PFDTS
ketebalan, yang nm _2.